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J. Semicond. > 2014, Volume 35 > Issue 11 > 115007

SEMICONDUCTOR INTEGRATED CIRCUITS

A 1.2 V 600 nW 12-bit 2 kS/s incremental ADC for biosensor application

Ting Huang1, Lele Jin1, Hui Li1, Shengxi Diao1, Guoxing Wang3, Libin Yao2 and Lin He1,

+ Author Affiliations

 Corresponding author: He Lin, Email:helin77@ustc.edu.cn

DOI: 10.1088/1674-4926/35/11/115007

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Abstract: This paper presents an ultra-low power incremental ADC for biosensor interface circuits. The ADC consists of a resettable second-order delta-sigma (Δ Σ) modulator core and a resettable decimation filter. Several techniques are adopted to minimize its power consumption. A feedforward path is introduced to the modulator core to relax the signal swing and linearity requirement of the integrators. A correlated-double-sampling (CDS) technique is applied to reject the offset and 1/f noise, thereby removing the integrator leakage and relaxing the gain requirement of the OTA. A simple double-tailed inverter-based fully differential OTA using a thick-oxide CMOS is proposed to operate in the subthreshold region to fulfill both an ultra-low power and a large output swing at 1.2 V supply. The signal addition before the comparator in the feedforward architecture is performed in the current domain instead of the voltage domain to minimize the capacitive load to the integrators. The capacitors used in this design are of customized metal-oxide-metal (MOM) type to reach the minimum capacitance set by the kT/C noise limit. Fabricated with a 1P6M 0.18 μm CMOS technology, the presented incremental ADC consumes 600 nW at 2 kS/s from a 1.2 V supply, and achieves 68.3 dB signal to noise and distortion ratio (SNDR) at the Nyquist frequency and an FOM of 0.14 pJ/conversion step. The core area is 100×120 μm2.

Key words: ADCincremental ADCfeedforwardinverter-based OTAbiosensor

The total demand of energy in the world increases with the demographic growth and the development of technology. Among all renewable energy sources, solar energy is extremely useful and promising as an abundant and clean energy source[1]. Photovoltaic conversion is one of the most advanced technologies, which consists in directly transforming solar energy into electric energy using a semiconductor and it has attracted attention for many decades. The high production cost of solar energy materials constitutes a serious drawback for the commercialization of photovoltaic cells. Furthermore, toxic substances are involved in the production and processing of most semiconductors, causing environmental problems. Thus, research efforts have been made, especially in the last decade, in order to develop materials which were able to guarantee optimal characteristics in terms of environmental compatibility, abundance and photoactivity[2]. Among the various metal oxide materials for photovoltaic applications, a promising material is zinc oxide (ZnO), one of the oldest known semiconductors. ZnO is an important binary Ⅱ-Ⅵ semiconductor compound because of its interesting properties such as resistivity control over the range 103-105Ωcm, transparency in the visible range, high electrochemical stability, direct band gap (3.3 eV) with large exciton binding energy of 60 meV at room temperature, absence of toxicity and good abundance in nature and high absorption coefficient suitable for solar cell applications. ZnO crystallizes preferentially in the hexagonal wurtzite structure and presents typically n-type electrical conductivity due to residual donors[3]. Thus it is promising in various applications, including laser diode[4], electronic and optoelectronic[5], phosphors[6], gas sensors[7]. They also can be used as transparent electrodes in dye-sensitized solar cells[8].

Various synthesis methods are usually used to prepare ZnO thin films, such as pulsed laser deposition[9], chemical vapor deposition[4], thermal oxidation[6], sol gel[10], photochemical deposition[11] and electrodeposition[12-15]. Besides these methods, electrodeposition provides several advantages over the other methods because of its simplicity, low equipment cost, the possibility of preparing large area thin films and the control of the film thickness[16]. ZnO thin films are usually electrodeposited from zinc precursor solution, such as zinc nitrate[17-20], zinc sulfate[21], zinc chloride[21-24]and zinc acetate[25, 26].

The growth mechanism in the electrochemical deposition of ZnO thin films is the reduction of an oxygen precursor at the interface of the electrode in the presence of zinc ions. Three main oxygen precursors have been described up to now: nitrate ions[12, 17, 18, 27, 28], dissolved molecular oxygen[25], and hydrogen peroxide[22, 29, 30]. Among them, the nitrate ion-based oxygen precursor has attracted considerable interest. Compared with other zinc precursors, the zinc nitrate precursor can act as both the zinc and oxygen precursor, which will simplify the electrolyte composition, and widen the adjustable range of oxygen concentration[31]. In order to improve the quality of the deposited films such as uniformity, adhesion and crystallinity, it is necessary to add a complexing agent into the electrolytic bath. Many researchers use various complexing agents such as polyvinylpyrolidone[19], lactic acid[20], tartaric acid[24], ethylene diamine tetra acetic acid[23, 26], citric acid[26] and sodium thiosulfate[11, 21, 32]. Furthermore, sodium thiosulfate shows a promising complexing agent of the deposited ZnO thin films because of its non-toxicity and low-cost compared to other complexing agents[19, 20, 23, 24, 26]. No work has been published concerning the electrodeposition of ZnO using sodium thiosulfate with zinc nitrate as precursor.

The aim of this work is devoted to the preparation of ZnO thin films onto Cu and ITO-coated glass substrates by electrodeposition technique in a solution of zinc nitrate with sodium thiosulfate. Cyclic voltammetry and chronoamperometry were utilized to study the electrochemical behavior of electrolyte bath containing zinc nitrate. The effect of sodium thiosulfate on the electrochemical deposition, structural and morphological of ZnO thin films was investigated. Deposited films were characterized by X-ray diffraction (XRD), Fourier transform infrared spectroscopy (FTIR), scanning electron microscopy (SEM), optical, photoelectrochemical (PEC) and electrical measurements.

All chemical reagents used in the present work were of analytical grade. Zinc nitrate hexahydrate (Zn (NO3)26H2O, 98%, Sigma Aldrich) was used as zinc and oxygen sources. However, sodium thiosulfate pentahydrate (Na2S2O35H2O, 99.5%, Sigma Aldrich) was added as complexing agent. All the aqueous solution was prepared using distilled water.

Electrodeposition of ZnO thin films was carried out using a three electrode electrochemical cell with a platinum (Pt) wire as a counter electrode, and copper (Cu) plates or indium tin oxide (ITO)-coated glass (8-10 Ω/square, Sigma Aldrich) substrates were used as working electrode. A saturated calomel electrode (SCE) was used in all experiments as a reference electrode. Before the deposition, the substrates were ultrasonically rinsed in 0.1 M HCl, distilled water, and acetone and then rinsed in distilled water[31, 24]. Zinc oxide thin films were electrodeposited in an aqueous solution of 0.1 M Zn (NO3)26H2O and 1.2 mM Na2S2O35H2O at 90 ℃. The pH of the solution was adjusted to 5.74 by NaOH additions. Sodium thiosulfate is used to stabilize Zn2+ ions in the solution[11, 21].

Cyclic voltammetry and chronoamperometry studies were carried out using Princeton Applied Research Model 273 A Potentiostat/Galvanostat, coupled to a personal computer with Power Suite software for data acquisition and potential control. Thin films of zinc oxide were electrodeposited at 0.60 V for 30 min. Following the deposition, the deposited ZnO films were dried in air at 100 ℃.

The crystalline phase of ZnO thin films was investigated by X-ray diffraction using a Bruker Discover D8 Diffractometer with CuKα radiation (λ=1.5406 Å). FTIR spectra were recorded on a Shimadzu FTIR-8000 series spectrophotometer in the wavelength range of 400-4000 cm1. Scanning electron microscopy imaging was performed using a VEGA3 TESCAN scanning electron microscope operating at 20 kV accelerating voltage. Optical transmittance of thin films was measured by a Perkin Elmer Lambda 950 UV-vis-NIR spectrometer in the wavelength range 200-1100 nm. Photoelectrochemical measurements were carried out by cyclic voltammetry technique in a three electrode electrochemical cell using deposited ZnO films as a working electrode, platinum wire as a counter electrode and a saturated calomel electrode (SCE) as a reference electrode from an aqueous solution containing 0.1 M sodium sulfate (Na2SO4). A tungsten halogen lamp (100 W) was used to illuminate an active area of 1.5 cm2 of ZnO electrode. Electrical properties of deposited ZnO films were determined by a HMS 3000 Hall measurement system at room temperature. Ag-paste was used at the corners of the films to make four good contacts with the probes. Thickness of the films was measured using Dektak stylus profilometer.

Fig. 1 shows the cyclic voltammograms of the solution containing 0.1 M zinc nitrate without (Fig. 1(a)) and with 1.2 mM sodium thiosulfate (Fig. 1(b)) at the same pH = 5.74 and T=90 ℃. The potential sweep was ranged from 0.2 to 1.2 V with a scan rate of 50 mV/s. From Fig. 1(a), the cathodic peak is observed around 0.61 V corresponding to the reduction of nitrate to nitrite ions with water molecules converted to hydroxide ions. These hydroxide ions combined with Zn2+ ions leading to the formation of Zn (OH)2, which dehydrated and converted to ZnO by the following mechanism[12]:

Figure  1.  Color online) Cyclic voltammograms of the solution containing 0.1 M Zn (NO3)26H2O at pH = 5.74 and T=90 ℃, (a) without and (b) with 1.2 mM sodium thiosulfate. The potential scanning rate was 50 mV/s.

Zn(NO3)2Zn2++2NO3,

(1)

NO3+H2O+2eNO2+2OH,

(2)

Zn2++2OHZn(OH)2ZnO+H2O.

(3)

From 1.1 V, an abrupt increase of cathodic current takes place, which can be mainly ascribed to the deposition of zinc with release of hydrogen [Eqs. (4) and (5)].

Zn2++2eZn, 

(4)

2H++2eH2.

(5)

During reverse anodic scan, an oxidation peak is observed at 0.8 V, which can be attributed to the anodic dissolution of zinc metal[27, 29, 33]. From Fig. 1(b), we can observe that in the presence of sodium thiosulfate, the cathodic peak current of the formation of ZnO is much higher which indicates an increase in the deposition rate of ZnO thin films, whereas the oxidation peak of zinc metal is decreased compared to that without sodium thiosulfate (Table 1). This difference can be attributed to a complexing effect of the Zn2+ ions by the sodium thiosulfate, leading to acceleration of the electrochemical reaction kinetics for the formation of ZnO thin films. This phenomenon was observed in Refs. [21, 24, 34]. The ratio between cathodic peak current with and without sodium thiosulfate is about 3.18. This value is higher than that of other complexing agents[20, 24].

Table  1.  Electrochemical parameters obtained from cyclic voltammograms.
DownLoad: CSV  | Show Table

Fig. 2 shows the chronoamperometry curve for the deposition of ZnO thin films onto Cu substrate with sodium thiosulfate at T=90 ℃ and E=0.6 V. The current starts with high value, which is assigned to a rapid nucleation growth. The decrease of cathodic current as function of time is due to a depletion of the metal-ion concentrations close to the electrode surface. The current stabilized at even longer time (1200 s). This confirms that the limited value of the stationary current is related to the formation of zinc oxide on the surface. A similar behavior was observed for different zinc salt solutions with other complexing agents[13, 19, 26].

Figure  2.  Chronoamperometry curve for the deposition of ZnO thin films.

The thickness of the deposited films was measured to be 357 nm. Fig. 3 shows the XRD patterns of ZnO thin films deposited onto ITO-coated glass substrates without (Fig. 3(a)) and with sodium thiosulfate (Fig. 3(b)). From this figure, X-ray diffraction patterns indicate that the obtained ZnO thin films have a hexagonal wurtzite-type structure with preferable (002) growth direction and all the peaks of ZnO thin films correspond to the peaks of standard ZnO (Zincite phase JCPDS 36-1451). For the films prepared from the nitrate zinc solution containing sodium thiosulfate, the intensity of the (002) diffraction peak of ZnO is significantly higher than that of the films without sodium thiosulfate. It is also interesting to note that the sodium thiosulfate improved the good crystallinity of deposited ZnO thin films. The values calculated for lattice constant parameters of the ZnO films (a=b=3.2909 Å, c=5.1926 Å) were slightly different than those of standard ZnO (JCPDS 36-1451, a=b=3.249 and c=5.206 Å)[18].

Figure  3.  XRD patterns of ZnO thin films deposited (a) without and (b) with sodium thiosulfate.

The crystallite size (D) of ZnO thin films was calculated from the major diffraction peaks of the base of (002) using Scherrer's formula (Eq. (6))[10, 35]:

D=0.89λ/βcosθ,

(6)

where λ is the wavelength of the incident beam (1.5406 Å), β is the full width at half maximum of the diffraction peak (002) and θ is the Bragg diffraction angle of the XRD peak in rad. The average crystallite size of deposited ZnO with sodium thiosulfate is found to be 34.69 nm. This value is greater than that of ZnO films without sodium thiosulfate (33.83 nm).

The comparison of the observed d values of ZnO films with JCPDS data (36-1451) are shown in Table 1. The value of d-spacing for ZnO films obtained was a little different than that of the d-spacing for standard hexagonal ZnO [JCPDS 36-1451], suggesting that all the ZnO films exhibited tensile strain and dislocation density, which is reported by others[36-38].

Table  2.  Comparison of the observed d values of ZnO films with JCPDS data (36-1451).
DownLoad: CSV  | Show Table

The dislocation density (δ), defined as the length of dislocation lines per unit volume, was evaluated from Eq. (7)[10]:

δ=1/D2.

(7)

Strain (ε) of the thin films was calculated by Eq. (8)[10]:

ε=βcosθ/4.

(8)

The evaluated structural parameters of deposited ZnO with sodium thiosulfate are regrouped in Table 3, which represents the values of full width at half maximum, the crystallite size, the dislocation density (δ) and the strain (ε) of the ZnO thin films from the (002) direction.

Table  3.  Structural parameters of ZnO thin films.
DownLoad: CSV  | Show Table

The ZnO thin films deposited onto Cu substrate with sodium thiosulfate were also examined by FTIR spectroscopy, the spectrum of which is shown in Fig. 4. From this spectrum, it can be observed apparently that there is a strong absorption band at 558 cm1 associated with the characteristic vibrational mode of ZnO. The broad absorption band centered at 3699 cm1 corresponds to the-OH group. Similar bands appeared in zinc acetate electrolyte for the deposition of ZnO thin films onto stainless steel substrate[10, 35].

Figure  4.  FTIR spectrum of ZnO thin films.

The surface morphologies of ZnO films deposited onto ITO-coated glass substrates obtained without and with sodium thiosulfate are shown in Fig. 5. The surface morphologies of deposited ZnO films prepared without sodium thiosulfate (Figs. 5(a) and 5(b)) shows non homogeneity and cracked growth surface. When sodium thiosulfate was added (Figs. 5(c) and 5(d)), we observed that the film structure is dense and uniform over a wide surface and composed of flower-like ZnO agglomerates with star-shape. Such type of star-shape and flower-like are also observed when ZnO thin films are deposited onto various substrates by different zinc salt solutions[13, 39].

Figure  5.  Color online) SEM images of ZnO films deposited onto ITO-coated glass substrates. Without sodium thiosulfate: (a) low-resolution image, (b) high-resolution image. With sodium thiosulfate: (c) low-resolution image, (d) high-resolution image.

The optical transmittance spectrum of ZnO thin films deposited with sodium thiosulfate from wavelength range of, 200-1100 nm taken at room temperature is shown in Fig. 6. It was shown that the films present a high optical transmission (>80%) in the visible wavelength range, which confirms the good optical quality of the electrodeposited ZnO thin films. The absorption coefficient (α) was determined in the order of >105 cm1.

Figure  6.  Transmittance spectrum of ZnO thin films.

The plot of (αhν)2 versus photon energy (hν) of deposited thin films was presented in Fig. 7. It has been observed that the plots of (αhν)2 versus (hν)are linear over a wide range of photon energies indicating the direct type of transitions. The band gap of the films was determined from Tauc's formula, which is as follows Eq. (9)[40]:

Figure  7.  Plot of (αhν)2 versus hν of ZnO thin films.

(αhν)2=A(hνEg),

(9)

where α is absorption coefficient, h is Planck's constant, ν is the photon energy, A is a constant and Eg is the direct transition band gap. The optical band gap value was determined by extrapolating the linear portion of the plot of (αhν)2 versus photon energy (hν), which is illustrated in Fig. 7. The band gap of ZnO thin films was estimated to be 3.28 eV, which is in good agreement with the values reported for ZnO films by others[41, 42]. The obtained energy gap results make ZnO film a promising semiconductor material for fabrication of photovoltaic solar cells.

Fig. 8 shows photoelectrochemical (PEC) response of zinc oxide (ZnO) deposited with sodium thiosulfate onto ITO-coated glass substrates at 0.6 V for the solution containing 0.1 M sodium sulfate (Na2SO4), in the dark and under illumination. In the dark, there is a negligible anodic photocurrent; however, under illumination of the surface of deposited zinc oxide, we observe an important anodic photocurrent compared with in the dark. These observations suggested that the excited minority carriers (h+*) diffuse to the surface to participate in the electrochemical reaction at the electrode interface with the ions present in the electrolyte[21]. The anodic photocurrent generation represents the typical behavior of the n-type semiconductor of the ZnO thin films. This n-type semiconductor was observed when ZnO thin films were deposited onto various substrates by different zinc salt solutions[35, 43]. n-type electrical conductivity of ZnO films will be also confirmed below by Hall effect measurements.

Figure  8.  Photoelectrochemical response of ZnO thin films in the dark and under illumination.

The Hall effect measurement results showed that the ZnO thin films deposited with sodium thiosulfate have n-type conductivity with carrier concentration of-1.3 × 1017 cm3, mobility of 7.35 cm2V1s1 and a low electrical resistivity of 6.54 Ωcm. These values are in agreement with the results reported by Chen[44].

Zinc oxide (ZnO) thin films have been successfully electrodeposited onto Cu and ITO-coated glass substrates from an aqueous zinc nitrate solutions with addition of sodium thiosulfate at 90 ℃. We found that the addition of sodium thiosulfate has a strong effect on the electrochemical reaction kinetics, crystallinity and uniformity of ZnO thin films. ZnO thin films were deposited at 0.60 V for 30 min with a film thickness of about 357 nm. X-ray diffraction analysis revealed that the synthesized ZnO thin films have a hexagonal wurtzite structure. The crystallite size was estimated to be 34.69 nm. FTIR results confirmed the presence of ZnO films at peak 558 cm1. SEM images of ZnO films showed uniform, compact morphology without any cracks and consisting of flower-like ZnO agglomerates with star-shape. Photoelectrochemical measurements of ZnO thin films showed that this film behaves as a semiconductor of type n and presents high photo anodic-generated currents. These films exhibited a high optical transmission (> 80%) and high absorption coefficient (α>105 cm1) in the visible region. The optical energy band gap was found to be 3.27 eV. Hall effect measurement results confirmed that the ZnO thin films have n-type conductivity with a low electrical resistivity of 6.54 Ωcm, carrier concentration of 1.3×1017 cm3 and mobility of 7.35 cm2V1s1. Taking account of its non-toxicity and low-cost, sodium thiosulfate could be used as a promising complexing agent to prepare ZnO thin films with suitable properties for fabrication of photovoltaic solar cells.



[1]
Harrison R R, Watkins P T, Kier R J, et al. A low-power integrated circuit for a wireless 100-electrode neural recording system. IEEE J Solid-State Circuits, 2007, 42(1):123 doi: 10.1109/JSSC.2006.886567
[2]
Zou X, Xu X, Yao L, et al. A 1-V 450-nW fully integrated programmable biomedical sensor interface chip. IEEE J Solid-State Circuits, 2009, 44(4):1067 doi: 10.1109/JSSC.2009.2014707
[3]
Chang Y K, Wang C S, Wang C K. A 8-bit 500-KS/s low power SAR ADC for bio-medical applications. IEEE Asian Solid-State Circuits Conference (ASSCC), 2007:228
[4]
Chen C H, Crop J, Chae J, et al. A 12-bit 7μW/channel 1 kHz/channel incremental ADC for biosensor interface circuits. IEEE Int Symp Circuits and Systems (ISCAS), 2012:2969
[5]
Yu W, Aslan M, Gabor C T. 82 dB SNDR 20-channel incremental ADC with optimal decimation filter and digital correction. IEEE Custom Integrated Circuits Conference (CICC), 2010:1
[6]
Gabor C T, Wang Y, Yu W H, et al. Incremental data converters. Proceedings of the 19th International Symposium on Mathematical Theory of Networks and Systems-MTNS, 2010, 5(9):715
[7]
Liang J, Johns D A. A frequency-scalable 15-bit incremental ADC for low power sensor applications. IEEE Int Symp Circuits Syst (ISCAS), 2010:2418
[8]
Liu Y T, Chen J, Chen M. An ultra low power dissipation inverter-based incremental sigma-delta ADC. Procedia Engineering 29, 2012:2050
[9]
Robert J, Valencic V. Offset and charge injection compensation in an incremental analog-to-digital converter. European Solid-State Circuits Conf, Toulouse, France, 1985: 45
[10]
Márkus J, Silva J, Gabor C T. Theory and applications of incremental delta-sigma converters. IEEE Trans Circuits Syst I, Regular Papers, 2004, 51(4):678 doi: 10.1109/TCSI.2004.826202
[11]
Hein S, Ibraham K, Zakhor A. New properties of sigma-delta modulators with DC inputs. IEEE Trans Commun, 1992, 40(8):1375 doi: 10.1109/26.156642
[12]
Kavusi S, Kakavand H, Gamal A E. On incremental sigma delta modulation with optimal filtering. IEEE Trans Circuits Syst I, Regular Papers, 2007, 53(5):1004
[13]
Steensgaard J, Zhang Z, Yu W, et al. Noise-power optimization of incremental data converters. IEEE Trans Circuits Syst I, Regular Papers, 2008, 55(5):1289 doi: 10.1109/TCSI.2008.916676
[14]
Garcia J, Rodriguez S, Rusu A. A low-power CT incremental 3rd order sigma-delta ADC for biosensor applications. IEEE Trans Circuits Syst I, Regular Papers, 2013, 60(1):25 doi: 10.1109/TCSI.2012.2215753
[15]
Silva J, Moon U K, Steensgaard J, et al. A wideband low-distortion delta-sigma ADC topology. Electron Lett, 2001, 37(12):737 doi: 10.1049/el:20010542
[16]
Schreier R, Silva J, Steensgaard J, et al. Design-oriented estimation of thermal noise in switched-capacitor circuits. IEEE Trans Circuits Syst I, 2005, 52(11):2358 doi: 10.1109/TCSI.2005.853909
[17]
Hirokazu Y, Gabor C T. Switched-capacitor track-and-hold amplifiers with low sensitivity to op-amp imperfections. IEEE Trans Circuits Syst I, Regular Papers, 2007, 54(1):193 doi: 10.1109/TCSI.2006.887454
[18]
Chae Y, Han G. Low voltage, low power, inverter-based switched capacitor delta-sigma modulator. IEEE J Solid-State Circuits, 2009, 44(2):458 doi: 10.1109/JSSC.2008.2010973
[19]
Yao L. Low-power low-voltage sigma-delta A/D converters in deep-submicron CMOS. PhD Dissertation, Katholieke Universiteit Leuven, Belgium, 2005
[20]
Zhang J, Lian Y, Yao L. A 0.6-V 82-dB 28.6-μW continuous-time audio delta-sigma modulator. IEEE J Solid-State Circuits, 2011, 46(10):2326 doi: 10.1109/JSSC.2011.2161212
Fig. 1.  A block diagram of the second-order incremental ADC

Fig. 2.  The fully differential circuit implementation for the ΔΣ modulator

Fig. 3.  The single-ended SC integrator. (a) A classic structure. (b) With CDS technique

Fig. 4.  Schematic diagram of the OTA

Fig. 5.  The switched-capacitor summator

Fig. 6.  The six-input comparator

Fig. 7.  The chip die photograph with the core layout

Fig. 8.  The test board

Fig. 9.  The measured output spectrum at 0.8 Vref. (a) 990 Hz. (b) Over the signal bandwidth

Table 1.   Performance comparison of recent incremental ADCs

[1]
Harrison R R, Watkins P T, Kier R J, et al. A low-power integrated circuit for a wireless 100-electrode neural recording system. IEEE J Solid-State Circuits, 2007, 42(1):123 doi: 10.1109/JSSC.2006.886567
[2]
Zou X, Xu X, Yao L, et al. A 1-V 450-nW fully integrated programmable biomedical sensor interface chip. IEEE J Solid-State Circuits, 2009, 44(4):1067 doi: 10.1109/JSSC.2009.2014707
[3]
Chang Y K, Wang C S, Wang C K. A 8-bit 500-KS/s low power SAR ADC for bio-medical applications. IEEE Asian Solid-State Circuits Conference (ASSCC), 2007:228
[4]
Chen C H, Crop J, Chae J, et al. A 12-bit 7μW/channel 1 kHz/channel incremental ADC for biosensor interface circuits. IEEE Int Symp Circuits and Systems (ISCAS), 2012:2969
[5]
Yu W, Aslan M, Gabor C T. 82 dB SNDR 20-channel incremental ADC with optimal decimation filter and digital correction. IEEE Custom Integrated Circuits Conference (CICC), 2010:1
[6]
Gabor C T, Wang Y, Yu W H, et al. Incremental data converters. Proceedings of the 19th International Symposium on Mathematical Theory of Networks and Systems-MTNS, 2010, 5(9):715
[7]
Liang J, Johns D A. A frequency-scalable 15-bit incremental ADC for low power sensor applications. IEEE Int Symp Circuits Syst (ISCAS), 2010:2418
[8]
Liu Y T, Chen J, Chen M. An ultra low power dissipation inverter-based incremental sigma-delta ADC. Procedia Engineering 29, 2012:2050
[9]
Robert J, Valencic V. Offset and charge injection compensation in an incremental analog-to-digital converter. European Solid-State Circuits Conf, Toulouse, France, 1985: 45
[10]
Márkus J, Silva J, Gabor C T. Theory and applications of incremental delta-sigma converters. IEEE Trans Circuits Syst I, Regular Papers, 2004, 51(4):678 doi: 10.1109/TCSI.2004.826202
[11]
Hein S, Ibraham K, Zakhor A. New properties of sigma-delta modulators with DC inputs. IEEE Trans Commun, 1992, 40(8):1375 doi: 10.1109/26.156642
[12]
Kavusi S, Kakavand H, Gamal A E. On incremental sigma delta modulation with optimal filtering. IEEE Trans Circuits Syst I, Regular Papers, 2007, 53(5):1004
[13]
Steensgaard J, Zhang Z, Yu W, et al. Noise-power optimization of incremental data converters. IEEE Trans Circuits Syst I, Regular Papers, 2008, 55(5):1289 doi: 10.1109/TCSI.2008.916676
[14]
Garcia J, Rodriguez S, Rusu A. A low-power CT incremental 3rd order sigma-delta ADC for biosensor applications. IEEE Trans Circuits Syst I, Regular Papers, 2013, 60(1):25 doi: 10.1109/TCSI.2012.2215753
[15]
Silva J, Moon U K, Steensgaard J, et al. A wideband low-distortion delta-sigma ADC topology. Electron Lett, 2001, 37(12):737 doi: 10.1049/el:20010542
[16]
Schreier R, Silva J, Steensgaard J, et al. Design-oriented estimation of thermal noise in switched-capacitor circuits. IEEE Trans Circuits Syst I, 2005, 52(11):2358 doi: 10.1109/TCSI.2005.853909
[17]
Hirokazu Y, Gabor C T. Switched-capacitor track-and-hold amplifiers with low sensitivity to op-amp imperfections. IEEE Trans Circuits Syst I, Regular Papers, 2007, 54(1):193 doi: 10.1109/TCSI.2006.887454
[18]
Chae Y, Han G. Low voltage, low power, inverter-based switched capacitor delta-sigma modulator. IEEE J Solid-State Circuits, 2009, 44(2):458 doi: 10.1109/JSSC.2008.2010973
[19]
Yao L. Low-power low-voltage sigma-delta A/D converters in deep-submicron CMOS. PhD Dissertation, Katholieke Universiteit Leuven, Belgium, 2005
[20]
Zhang J, Lian Y, Yao L. A 0.6-V 82-dB 28.6-μW continuous-time audio delta-sigma modulator. IEEE J Solid-State Circuits, 2011, 46(10):2326 doi: 10.1109/JSSC.2011.2161212
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    Hassiba Rahal, Rafiaa Kihal, Abed Mohamed Affoune, Mokhtar Ghers, Faycal Djazi. Electrodeposition and characterization of ZnO thin films using sodium thiosulfate as an additive for photovoltaic solar cells[J]. Journal of Semiconductors, 2017, 38(5): 053002. doi: 10.1088/1674-4926/38/5/053002
    H Rahal, R Kihal, A M Affoune, M Ghers, F Djazi. Electrodeposition and characterization of ZnO thin films using sodium thiosulfate as an additive for photovoltaic solar cells[J]. J. Semicond., 2017, 38(5): 053002. doi: 10.1088/1674-4926/38/5/053002.
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    Received: 10 March 2014 Revised: 05 May 2014 Online: Published: 01 November 2014

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      Hassiba Rahal, Rafiaa Kihal, Abed Mohamed Affoune, Mokhtar Ghers, Faycal Djazi. Electrodeposition and characterization of ZnO thin films using sodium thiosulfate as an additive for photovoltaic solar cells[J]. Journal of Semiconductors, 2017, 38(5): 053002. doi: 10.1088/1674-4926/38/5/053002 ****H Rahal, R Kihal, A M Affoune, M Ghers, F Djazi. Electrodeposition and characterization of ZnO thin films using sodium thiosulfate as an additive for photovoltaic solar cells[J]. J. Semicond., 2017, 38(5): 053002. doi: 10.1088/1674-4926/38/5/053002.
      Citation:
      Ting Huang, Lele Jin, Hui Li, Shengxi Diao, Guoxing Wang, Libin Yao, Lin He. A 1.2 V 600 nW 12-bit 2 kS/s incremental ADC for biosensor application[J]. Journal of Semiconductors, 2014, 35(11): 115007. doi: 10.1088/1674-4926/35/11/115007 ****
      T Huang, L L Jin, H Li, S X Diao, G X Wang, L B Yao, L He. A 1.2 V 600 nW 12-bit 2 kS/s incremental ADC for biosensor application[J]. J. Semicond., 2014, 35(11): 115007. doi: 10.1088/1674-4926/35/11/115007.

      A 1.2 V 600 nW 12-bit 2 kS/s incremental ADC for biosensor application

      DOI: 10.1088/1674-4926/35/11/115007
      Funds:

      the National Natural Science Foundation of China 61204033

      the Science and Technology Commission of Shanghai Municipality 13511500200

      Project supported by the National Natural Science Foundation of China (No. 61204033) and the Science and Technology Commission of Shanghai Municipality (No. 13511500200)

      More Information
      • Corresponding author: He Lin, Email:helin77@ustc.edu.cn
      • Received Date: 2014-03-10
      • Revised Date: 2014-05-05
      • Published Date: 2014-11-01

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