Chin. J. Semicond. > 1996, Volume 17 > Issue 9 > 706-712
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MeV Si离子注入对BF_2注入Si样品特性的影响

赵清太，王忠烈

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    Received: 18 August 2015 Revised: Online: Published: 01 September 1996

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      Article Navigation >  Journal of Semiconductors  > 1996  >  17(9): 706-712
      赵清太，王忠烈. MeV Si离子注入对BF_2注入Si样品特性的影响[J]. 半导体学报(英文版), 1996, 17(9): 706-712.
      Citation:
      赵清太，王忠烈. MeV Si离子注入对BF_2注入Si样品特性的影响[J]. 半导体学报(英文版), 1996, 17(9): 706-712.
      shu

      • Received Date: 2015-08-18

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