An Alternative Method for SU-8 Removal Using PDMS Technique

Li Jianhua , Chen Di , Zhang Jinya , Liu Jingquan and and Zhu Jun

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Key words: SU-8 removal, electroplating, PDMS, micromold insert, high-aspect-ratio microstructures

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Received: 19 August 2015 Revised: Online: Published: 01 May 2005

Article Navigation > Journal of Semiconductors > 2005 > 26(5): 899-903

Li Jianhua, Chen Di, Zhang Jinya, Liu Jingquan, and Zhu Jun. An Alternative Method for SU-8 Removal Using PDMS Technique[J]. 半导体学报(英文版), 2005, 26(5): 899-903.

Citation:

Li Jianhua, Chen Di, Zhang Jinya, Liu Jingquan, and Zhu Jun. An Alternative Method for SU-8 Removal Using PDMS Technique[J]. 半导体学报(英文版), 2005, 26(5): 899-903.

Li Jianhua, Chen Di, Zhang Jinya, Liu Jingquan, and Zhu Jun. An Alternative Method for SU-8 Removal Using PDMS Technique[J]. 半导体学报(英文版), 2005, 26(5): 899-903.

Citation:

Li Jianhua, Chen Di, Zhang Jinya, Liu Jingquan, and Zhu Jun. An Alternative Method for SU-8 Removal Using PDMS Technique[J]. 半导体学报(英文版), 2005, 26(5): 899-903.

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