Chin. J. Semicond. > 1985, Volume 6 > Issue 5 > 528-535
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用喇曼光谱测注硼硅片的损伤分布

吴华生 , 劳浦东 , 邬建根 and 屈逢源

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    Received: 20 August 2015 Revised: Online: Published: 01 May 1985

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      Article Navigation >  Journal of Semiconductors  > 1985  >  6(5): 528-535
      吴华生, 劳浦东, 邬建根, 屈逢源. 用喇曼光谱测注硼硅片的损伤分布[J]. 半导体学报(英文版), 1985, 6(5): 528-535.
      Citation:
      吴华生, 劳浦东, 邬建根, 屈逢源. 用喇曼光谱测注硼硅片的损伤分布[J]. 半导体学报(英文版), 1985, 6(5): 528-535.
      shu

      • Received Date: 2015-08-20

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