Chin. J. Semicond. > 2001, Volume 22 > Issue 6 > 811-816

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多晶硅发射极超高速集成电路工艺

张利春 , 倪学文 and 王阳元

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Key words: 多晶硅发射极, 超高速, 集成电路, 工艺研究

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    Received: 20 August 2015 Revised: Online: Published: 01 June 2001

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      Article Navigation >  Journal of Semiconductors  > 2001  >  22(6): 811-816
      张利春, 倪学文, 王阳元. 多晶硅发射极超高速集成电路工艺[J]. 半导体学报(英文版), 2001, 22(6): 811-816.
      Citation:
      张利春, 倪学文, 王阳元. 多晶硅发射极超高速集成电路工艺[J]. 半导体学报(英文版), 2001, 22(6): 811-816.
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      • Received Date: 2015-08-20

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