Chin. J. Semicond. > 2005, Volume 26 > Issue 5 > 1054-1058
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考虑缺陷形状分布的IC成品率模型

王俊平 and 郝跃

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Key words: 真实缺陷, 形状分布, 圆缺陷模型, 成品率模型

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    Received: 19 August 2015 Revised: Online: Published: 01 May 2005

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      Article Navigation >  Journal of Semiconductors  > 2005  >  26(5): 1054-1058
      王俊平, 郝跃. 考虑缺陷形状分布的IC成品率模型[J]. 半导体学报(英文版), 2005, 26(5): 1054-1058.
      Citation:
      王俊平, 郝跃. 考虑缺陷形状分布的IC成品率模型[J]. 半导体学报(英文版), 2005, 26(5): 1054-1058.
      shu

      • Received Date: 2015-08-19

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