Chin. J. Semicond. > 2004, Volume 25 > Issue 10 > 1269-1272
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单晶硅衬底材料中的消光衍射

黄代绘 , 李卫 , 冯良桓 and 朱居木

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Key words: 硅基材料, Si(200)衍射, Si(222)衍射

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    Received: 19 August 2015 Revised: Online: Published: 01 October 2004

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      Article Navigation >  Journal of Semiconductors  > 2004  >  25(10): 1269-1272
      黄代绘, 李卫, 冯良桓, 朱居木. 单晶硅衬底材料中的消光衍射[J]. 半导体学报(英文版), 2004, 25(10): 1269-1272.
      Citation:
      黄代绘, 李卫, 冯良桓, 朱居木. 单晶硅衬底材料中的消光衍射[J]. 半导体学报(英文版), 2004, 25(10): 1269-1272.
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      • Received Date: 2015-08-19

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