Chin. J. Semicond. > 1982, Volume 3 > Issue 4 > 337-339
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硅(111)晶片外延时图形微畸变的研究

陈明琪 , 杨传铮 and 王广福

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    Received: 20 August 2015 Revised: Online: Published: 01 April 1982

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      Article Navigation >  Journal of Semiconductors  > 1982  >  3(4): 337-339
      陈明琪, 杨传铮, 王广福. 硅(111)晶片外延时图形微畸变的研究[J]. 半导体学报(英文版), 1982, 3(4): 337-339.
      Citation:
      陈明琪, 杨传铮, 王广福. 硅(111)晶片外延时图形微畸变的研究[J]. 半导体学报(英文版), 1982, 3(4): 337-339.
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      • Received Date: 2015-08-20

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