Chin. J. Semicond. > 2004, Volume 25 > Issue 12 > 1624-1627
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硅烷浓度对本征微晶硅材料的影响

朱锋 , 张晓丹 , 赵颖 , 魏长春 , 孙建 and 耿新华

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Key words: VHF-PECVD, 微晶硅, 光发射谱

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    Received: 19 August 2015 Revised: Online: Published: 01 December 2004

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      Article Navigation >  Journal of Semiconductors  > 2004  >  25(12): 1624-1627
      朱锋, 张晓丹, 赵颖, 魏长春, 孙建, 耿新华. 硅烷浓度对本征微晶硅材料的影响[J]. 半导体学报(英文版), 2004, 25(12): 1624-1627.
      Citation:
      朱锋, 张晓丹, 赵颖, 魏长春, 孙建, 耿新华. 硅烷浓度对本征微晶硅材料的影响[J]. 半导体学报(英文版), 2004, 25(12): 1624-1627.
      shu

      • Received Date: 2015-08-19

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