Chin. J. Semicond. > 2004, Volume 25 > Issue 7 > 847-851
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非制冷热释电薄膜红外探测器热绝缘结构的研制

李靓 , 姚熹 and 张良莹

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Key words: 热释电薄膜红外探测器, 热绝缘结构, 溶胶凝胶法, 多孔SiO2薄膜, 过渡SiO2薄膜

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    Received: 19 August 2015 Revised: Online: Published: 01 July 2004

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      Article Navigation >  Journal of Semiconductors  > 2004  >  25(7): 847-851
      李靓, 姚熹, 张良莹. 非制冷热释电薄膜红外探测器热绝缘结构的研制[J]. 半导体学报(英文版), 2004, 25(7): 847-851.
      Citation:
      李靓, 姚熹, 张良莹. 非制冷热释电薄膜红外探测器热绝缘结构的研制[J]. 半导体学报(英文版), 2004, 25(7): 847-851.
      shu

      • Received Date: 2015-08-19

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