Chin. J. Semicond. > 2005, Volume 26 > Issue 5 > 1040-1044
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一种改进的旋转式微机械结构

刘祖韬 , 黄庆安 and 李伟华

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Key words: 微机械, 微旋转结构, 残余应变, 测量, 有限元分析

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    Received: 19 August 2015 Revised: Online: Published: 01 May 2005

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      Article Navigation >  Journal of Semiconductors  > 2005  >  26(5): 1040-1044
      刘祖韬, 黄庆安, 李伟华. 一种改进的旋转式微机械结构[J]. 半导体学报(英文版), 2005, 26(5): 1040-1044.
      Citation:
      刘祖韬, 黄庆安, 李伟华. 一种改进的旋转式微机械结构[J]. 半导体学报(英文版), 2005, 26(5): 1040-1044.
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      • Received Date: 2015-08-19

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