Chin. J. Semicond. > 2001, Volume 22 > Issue 7 > 837-840
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一种微机械光开关的分析和设计(英文)

贾玉斌 , 陈良惠 and 李玉璋

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Key words: 微机械, 光开关, 悬臂梁, 阈值电压

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    Received: 20 August 2015 Revised: Online: Published: 01 July 2001

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      Article Navigation >  Journal of Semiconductors  > 2001  >  22(7): 837-840
      贾玉斌, 陈良惠, 李玉璋. 一种微机械光开关的分析和设计(英文)[J]. 半导体学报(英文版), 2001, 22(7): 837-840.
      Citation:
      贾玉斌, 陈良惠, 李玉璋. 一种微机械光开关的分析和设计(英文)[J]. 半导体学报(英文版), 2001, 22(7): 837-840.
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      • Received Date: 2015-08-20

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