| Citation: |
Wu Zhigang, Zhang Weigang, Wang Zhi, Kai Guiyun, Yuan Shuzhong, Dong Xiaoyi, Utaka K, Wada Y. Fabrication and Evaluation of Bragg Gratings on Optimally Designed Silicon-on-Insulator Rib Waveguides Using Electron-Beam Lithography[J]. Journal of Semiconductors, 2006, 27(8): 1347-1350.
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Wu Z G, Zhang W G, Wang Z, Kai G Y, Yuan S Z, Dong X Y, Utaka K, Wada Y. Fabrication and Evaluation of Bragg Gratings on Optimally Designed Silicon-on-Insulator Rib Waveguides Using Electron-Beam Lithography[J]. Chin. J. Semicond., 2006, 27(8): 1347.
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Fabrication and Evaluation of Bragg Gratings on Optimally Designed Silicon-on-Insulator Rib Waveguides Using Electron-Beam Lithography
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Abstract
The fabrication of Bragg gratings on silicon-on-insulator (SOI) rib waveguides using electron-beam lithography is presented.The grating waveguide is optimally designed for actual photonic integration.Experimental and theoretical evaluations of the Bragg grating are demonstrated.By thinning the SOI device layer and deeply etching the Bragg grating,a large grating coupling coefficient of 30cm-1 is obtained.-
Keywords:
- integrated optics,
- Bragg grating,
- silicon-on-insulator,
- rib waveguide
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References
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Proportional views
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