Chin. J. Semicond. > 2005, Volume 26 > Issue 5 > 1028-1032
|

CONTENTS

MEMS多层膜残余应力全场光学在线测试

聂萌 , 黄庆安 and 李伟华

+ Author Affiliations

PDF

Key words: 残余应力, 多层膜, 曲率半径

    • Search

    Advanced Search >>

    GET CITATION

    shu

    Export: BibTex EndNote

    Article Metrics

    Article views: 2298 Times PDF downloads: 1800 Times Cited by: 0 Times

    History

    Received: 19 August 2015 Revised: Online: Published: 01 May 2005

    Catalog

      Email This Article

      User name:
      Email:*请输入正确邮箱
      Code:*验证码错误
      Send
      Article Navigation >  Journal of Semiconductors  > 2005  >  26(5): 1028-1032
      聂萌, 黄庆安, 李伟华. MEMS多层膜残余应力全场光学在线测试[J]. 半导体学报(英文版), 2005, 26(5): 1028-1032.
      Citation:
      聂萌, 黄庆安, 李伟华. MEMS多层膜残余应力全场光学在线测试[J]. 半导体学报(英文版), 2005, 26(5): 1028-1032.
      shu

      • Received Date: 2015-08-19

      Catalog

        Journal of Semiconductors © 2017 All Rights Reserved   京ICP备05085259号-2

        /

        DownLoad:  Full-Size Img  PowerPoint
        Return
        Return