| Citation: |
Li ZhiYang, Li Yuntao, Liu Jingwei, Chen Shaowu, Yu Jinzhong. Compact Blocking 8×8 Optical Matrix Switch on S01 with Taper Waveguides and Self-Aligned Total Internal Reflection Mirrors[J]. Journal of Semiconductors, 2007, 28(S1): 516-519.
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Li Z Y, Li Y T, Liu J W, Chen S W, Yu J Z. Compact Blocking 8×8 Optical Matrix Switch on S01 with Taper Waveguides and Self-Aligned Total Internal Reflection Mirrors[J]. Chin. J. Semicond., 2007, 28(S1): 516.
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Compact Blocking 8×8 Optical Matrix Switch on S01 with Taper Waveguides and Self-Aligned Total Internal Reflection Mirrors
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Abstract
Novel folding 8×8 matrix switches based on silicon.on-insulator(SOI)were demonstrated.In the design，single mode rib waveguides and multimode interferences(MMIs)are connected by optimized tapered waveguides to reduce the mode coupling loss between the two types of waveguides.And the self-aligned method was applied to the key integrated turn· ing mirrors for perfect positioas and low loss of them.The switch element( SE) with high switching speed and low power consumption is presented in the matrix.The average insertion loss of the matrix is about 21dB and the excess loss of one mir· rot is measured to be 1.4dB.The worst crosstalk is larger than -21dB.Experimental results show that some of the main characteristics of optical matrix switches are developed in the modified design，which agree with the theoretieal analyses. -
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