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徐晨曦, 阮刚, 王建伟. 二维离子注入的改进模型及数值模拟[J]. 半导体学报(英文版), 1988, 9(3): 269-277.
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Received: 19 August 2015 Revised: Online: Published: 01 March 1988
Citation: |
徐晨曦, 阮刚, 王建伟. 二维离子注入的改进模型及数值模拟[J]. 半导体学报(英文版), 1988, 9(3): 269-277.
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