Chin. J. Semicond. > 2003, Volume 24 > Issue 12 > 1266-1271
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一种新的光学临近校正方法(英文)

李卓远 , 吴为民 , 王旸 and 洪先龙

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Key words: 基于规则, v-SVR, 光学临近校正

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    Received: 20 August 2015 Revised: Online: Published: 01 December 2003

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      Article Navigation >  Journal of Semiconductors  > 2003  >  24(12): 1266-1271
      李卓远, 吴为民, 王旸, 洪先龙. 一种新的光学临近校正方法(英文)[J]. 半导体学报(英文版), 2003, 24(12): 1266-1271.
      Citation:
      李卓远, 吴为民, 王旸, 洪先龙. 一种新的光学临近校正方法(英文)[J]. 半导体学报(英文版), 2003, 24(12): 1266-1271.
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      • Received Date: 2015-08-20

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