Chin. J. Semicond. > 1993, Volume 14 > Issue 3 > 166-173
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BF_2~+注入硅分子效应的椭偏谱多层分析

朱文玉 , 李晓勤 , 林成鲁 , 陈树光 and 徐运海

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    Received: 20 August 2015 Revised: Online: Published: 01 March 1993

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      Article Navigation >  Journal of Semiconductors  > 1993  >  14(3): 166-173
      朱文玉, 李晓勤, 林成鲁, 陈树光, 徐运海. BF_2~+注入硅分子效应的椭偏谱多层分析[J]. 半导体学报(英文版), 1993, 14(3): 166-173.
      Citation:
      朱文玉, 李晓勤, 林成鲁, 陈树光, 徐运海. BF_2~+注入硅分子效应的椭偏谱多层分析[J]. 半导体学报(英文版), 1993, 14(3): 166-173.
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      • Received Date: 2015-08-20

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