Chin. J. Semicond. > 2002, Volume 23 > Issue 10 > 1067-1072
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Al/a-Si∶H复合薄膜的电导性能

王瑞春 , 杜丕一 , 翁文剑 and 韩高荣

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Key words: a-Si∶H, Al诱导晶化, 双层复合薄膜, 多晶硅

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    Received: 19 August 2015 Revised: Online: Published: 01 October 2002

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      Article Navigation >  Journal of Semiconductors  > 2002  >  23(10): 1067-1072
      王瑞春, 杜丕一, 翁文剑, 韩高荣. Al/a-Si∶H复合薄膜的电导性能[J]. 半导体学报(英文版), 2002, 23(10): 1067-1072.
      Citation:
      王瑞春, 杜丕一, 翁文剑, 韩高荣. Al/a-Si∶H复合薄膜的电导性能[J]. 半导体学报(英文版), 2002, 23(10): 1067-1072.
      shu

      • Received Date: 2015-08-19

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