Citation: |
谢泉, 侯立松, 阮昊, 干福熹, 李晶. 溅射参数对Ge_2Sb_2Te_5薄膜光学常数的影响[J]. 半导体学报(英文版), 2001, 22(2): 187-192.
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Key words: 光学常数, Ge2Sb2Te5薄膜, 溅射参数
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Received: 19 August 2015 Revised: Online: Published: 01 February 2001
Citation: |
谢泉, 侯立松, 阮昊, 干福熹, 李晶. 溅射参数对Ge_2Sb_2Te_5薄膜光学常数的影响[J]. 半导体学报(英文版), 2001, 22(2): 187-192.
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