Chin. J. Semicond. > 2001, Volume 22 > Issue 2 > 187-192
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溅射参数对Ge_2Sb_2Te_5薄膜光学常数的影响

谢泉 , 侯立松 , 阮昊 , 干福熹 and 李晶

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Key words: 光学常数, Ge2Sb2Te5薄膜, 溅射参数

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    Received: 19 August 2015 Revised: Online: Published: 01 February 2001

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      Article Navigation >  Journal of Semiconductors  > 2001  >  22(2): 187-192
      谢泉, 侯立松, 阮昊, 干福熹, 李晶. 溅射参数对Ge_2Sb_2Te_5薄膜光学常数的影响[J]. 半导体学报(英文版), 2001, 22(2): 187-192.
      Citation:
      谢泉, 侯立松, 阮昊, 干福熹, 李晶. 溅射参数对Ge_2Sb_2Te_5薄膜光学常数的影响[J]. 半导体学报(英文版), 2001, 22(2): 187-192.
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      • Received Date: 2015-08-19

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