Chin. J. Semicond. > 2004, Volume 25 > Issue 5 > 530-534
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一种新型磁场MWECR-CVD和氢化非晶硅薄膜制备

殷生毅 , 陈光华 , 吴越颖 , 王青 , 刘毅 , 张文理 , 宋雪梅 and 邓金祥

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Key words: ECR-CVD, 永磁体, 磁场, 氢化非晶硅

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    Received: 19 August 2015 Revised: Online: Published: 01 May 2004

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      Article Navigation >  Journal of Semiconductors  > 2004  >  25(5): 530-534
      殷生毅, 陈光华, 吴越颖, 王青, 刘毅, 张文理, 宋雪梅, 邓金祥. 一种新型磁场MWECR-CVD和氢化非晶硅薄膜制备[J]. 半导体学报(英文版), 2004, 25(5): 530-534.
      Citation:
      殷生毅, 陈光华, 吴越颖, 王青, 刘毅, 张文理, 宋雪梅, 邓金祥. 一种新型磁场MWECR-CVD和氢化非晶硅薄膜制备[J]. 半导体学报(英文版), 2004, 25(5): 530-534.
      shu

      • Received Date: 2015-08-19

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