Chin. J. Semicond. > 2001, Volume 22 > Issue 1 > 53-56
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Si_(1-x-y)Ge_xC_y三元系材料的应变补偿特性

于卓 , 李代宗 , 成步文 , 黄昌俊 , 雷震霖 , 余金中 , 王启明 and 梁骏吾

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Key words: Si1-x-yGexCy材料, 固相外延, 应变补偿

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    Received: 19 August 2015 Revised: Online: Published: 01 January 2001

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      Article Navigation >  Journal of Semiconductors  > 2001  >  22(1): 53-56
      于卓, 李代宗, 成步文, 黄昌俊, 雷震霖, 余金中, 王启明, 梁骏吾. Si_(1-x-y)Ge_xC_y三元系材料的应变补偿特性[J]. 半导体学报(英文版), 2001, 22(1): 53-56.
      Citation:
      于卓, 李代宗, 成步文, 黄昌俊, 雷震霖, 余金中, 王启明, 梁骏吾. Si_(1-x-y)Ge_xC_y三元系材料的应变补偿特性[J]. 半导体学报(英文版), 2001, 22(1): 53-56.
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      • Received Date: 2015-08-19

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