Chin. J. Semicond. > 2002, Volume 23 > Issue 10 > 1078-1082
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Ar气压对射频磁控溅射铝掺杂ZnO薄膜特性的影响

宋登元 , 王永青 , 孙荣霞 , 宗晓萍 and 郭宝增

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Key words: ZnO薄膜, 铝掺杂, 射频磁控溅射, 溅射气压, SEM形貌

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    Received: 19 August 2015 Revised: Online: Published: 01 October 2002

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      Article Navigation >  Journal of Semiconductors  > 2002  >  23(10): 1078-1082
      宋登元, 王永青, 孙荣霞, 宗晓萍, 郭宝增. Ar气压对射频磁控溅射铝掺杂ZnO薄膜特性的影响[J]. 半导体学报(英文版), 2002, 23(10): 1078-1082.
      Citation:
      宋登元, 王永青, 孙荣霞, 宗晓萍, 郭宝增. Ar气压对射频磁控溅射铝掺杂ZnO薄膜特性的影响[J]. 半导体学报(英文版), 2002, 23(10): 1078-1082.
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      • Received Date: 2015-08-19

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