Chin. J. Semicond. > 2001, Volume 22 > Issue 1 > 102-106
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针孔缺陷对集成电路功能成品率影响分析与仿真

马佩军 , 郝跃 and 刘红侠

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Key words: 集成电路, Monte-Carlo方法, 仿真

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    Received: 19 August 2015 Revised: Online: Published: 01 January 2001

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      Article Navigation >  Journal of Semiconductors  > 2001  >  22(1): 102-106
      马佩军, 郝跃, 刘红侠. 针孔缺陷对集成电路功能成品率影响分析与仿真[J]. 半导体学报(英文版), 2001, 22(1): 102-106.
      Citation:
      马佩军, 郝跃, 刘红侠. 针孔缺陷对集成电路功能成品率影响分析与仿真[J]. 半导体学报(英文版), 2001, 22(1): 102-106.
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      • Received Date: 2015-08-19

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