Chin. J. Semicond. > 2004, Volume 25 > Issue 6 > 687-690
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光敏性溶胶-凝胶波导材料

姜永睿 , 胡雄伟 , 杨沁清 , 王红杰 , 杨澜 and 谢二庆

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Key words: 光敏性溶胶凝胶, SiO2薄膜, 折射率, 波导

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    Received: 19 August 2015 Revised: Online: Published: 01 June 2004

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      Article Navigation >  Journal of Semiconductors  > 2004  >  25(6): 687-690
      姜永睿, 胡雄伟, 杨沁清, 王红杰, 杨澜, 谢二庆. 光敏性溶胶-凝胶波导材料[J]. 半导体学报(英文版), 2004, 25(6): 687-690.
      Citation:
      姜永睿, 胡雄伟, 杨沁清, 王红杰, 杨澜, 谢二庆. 光敏性溶胶-凝胶波导材料[J]. 半导体学报(英文版), 2004, 25(6): 687-690.
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      • Received Date: 2015-08-19

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