Wet Oxidation of AlxGa1－xAs/GaAs Distributed Bragg Reflectors

Li Ruoyuan , Wang Zhanguo , Xu Bo , Jin Peng , Zhang Chunling , Guo Xia and and Chen Min

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Key words: wet oxidation, vertical cavity surface emitting laser, distributed Bragg reflectors, Al2O3, interface

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Received: 18 August 2015 Revised: Online: Published: 01 August 2005

Article Navigation > Journal of Semiconductors > 2005 > 26(8): 1519-1523

Li Ruoyuan, Wang Zhanguo, Xu Bo, Jin Peng, Zhang Chunling, Guo Xia, and Chen Min. Wet Oxidation of AlxGa1－xAs/GaAs Distributed Bragg Reflectors[J]. 半导体学报(英文版), 2005, 26(8): 1519-1523.

Citation:

Li Ruoyuan, Wang Zhanguo, Xu Bo, Jin Peng, Zhang Chunling, Guo Xia, and Chen Min. Wet Oxidation of AlxGa1－xAs/GaAs Distributed Bragg Reflectors[J]. 半导体学报(英文版), 2005, 26(8): 1519-1523.