Chin. J. Semicond. > Volume 2 > Issue 4 > Article Number: 273

液相外延Ga_(1-x)Al_xAs层中位错组态的透射电镜研究

梁静国 , 冯孙齐 , 潘桂明 and 陈娓兮

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Abstract: 用超高压电镜观察了液相外延Ga_(1-x)Al_xAs层中位错的组态.观察到不均匀分布的位错网络,位错网络位于外延层内,而不是在GaAs/GaAlAs界面上;散布在位错网络中的不同尺寸的位错环,以及夹杂物引起的位错丛.对上述位错组态形成机制作了讨论.还观察到大块的孤立层错.

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History

Manuscript received: 20 August 2015 Manuscript revised: Online: Published: 01 April 1981

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