Chin. J. Semicond. > Volume 16 > Issue 8 > Article Number: 618

硅片的抗弯强度及其测量

谢书银,石志仪

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Abstract: 研究了硅片抗弯强度,提出了一种圆片冲击定量测定硅片抗弯强度的方法,讨论了其准确度及精度并通过实验进行了偏离小挠度的校准.

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History

Manuscript received: 19 August 2015 Manuscript revised: Online: Published: 01 August 1995

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