Chin. J. Semicond. > Volume 14 > Issue 2 > Article Number: 88

AlGaAs/GaAs异质结构外延材料均匀性的电光测量

朱祖华 , 丁纯 , 丁桂兰 , 王硕勤 , 沈浩瀛 , 彭正夫 and 王翠莲

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Abstract: 本文介绍了连续波电光检测法(CWEOP—continuous wave electro-optic probing)应用于AlGaAs/GaAs异质结构材料均匀性测量的原理、实验装置和实验结果。扫描电子显微镜电压衬度技术也用于观察测量样片,比较两者的结果发现有较好的对照。最后,讨论了实验结果,并对方法的应用作了展望。

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History

Manuscript received: 20 August 2015 Manuscript revised: Online: Published: 01 February 1993

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