Chin. J. Semicond. > 1985, Volume 6 > Issue 3 > 320-322
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Ar~+注入吸杂效应与剂量的关系

潘姬 , 齐建华 , 赵鸿麟 , 汪一沙 and 王春亮

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    Received: 20 August 2015 Revised: Online: Published: 01 March 1985

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      Article Navigation >  Journal of Semiconductors  > 1985  >  6(3): 320-322
      潘姬, 齐建华, 赵鸿麟, 汪一沙, 王春亮. Ar~+注入吸杂效应与剂量的关系[J]. 半导体学报(英文版), 1985, 6(3): 320-322.
      Citation:
      潘姬, 齐建华, 赵鸿麟, 汪一沙, 王春亮. Ar~+注入吸杂效应与剂量的关系[J]. 半导体学报(英文版), 1985, 6(3): 320-322.
      shu

      • Received Date: 2015-08-20

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