Chin. J. Semicond. > 2004, Volume 25 > Issue 9 > 1154-1158
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基于MEMS技术的一种新型可变形反射镜

余洪斌 , 陈海清 , 竺子民 , 张大成 and 李婷

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Key words: 可变形反射镜, 体微加工, 静电驱动, 响应频率

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    Received: 19 August 2015 Revised: Online: Published: 01 September 2004

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      Article Navigation >  Journal of Semiconductors  > 2004  >  25(9): 1154-1158
      余洪斌, 陈海清, 竺子民, 张大成, 李婷. 基于MEMS技术的一种新型可变形反射镜[J]. 半导体学报(英文版), 2004, 25(9): 1154-1158.
      Citation:
      余洪斌, 陈海清, 竺子民, 张大成, 李婷. 基于MEMS技术的一种新型可变形反射镜[J]. 半导体学报(英文版), 2004, 25(9): 1154-1158.
      shu

      • Received Date: 2015-08-19

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