Chin. J. Semicond. > 2001, Volume 22 > Issue 6 > 774-778
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背面Ar~+轰击对n~-沟MOSFET特性的影响

黄美浅 , 李观启 and 曾绍洪

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Key words: 背面Ar+轰击, n-MOSFET

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    Received: 20 August 2015 Revised: Online: Published: 01 June 2001

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      Article Navigation >  Journal of Semiconductors  > 2001  >  22(6): 774-778
      黄美浅, 李观启, 曾绍洪. 背面Ar~+轰击对n~-沟MOSFET特性的影响[J]. 半导体学报(英文版), 2001, 22(6): 774-778.
      Citation:
      黄美浅, 李观启, 曾绍洪. 背面Ar~+轰击对n~-沟MOSFET特性的影响[J]. 半导体学报(英文版), 2001, 22(6): 774-778.
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      • Received Date: 2015-08-20

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