Fig. 1.
(Color online) Schematic of a CMUT fabricated using a sacrificial release process.
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| Citation: |
Licheng Jia, Rihui Xue, Fansheng Meng. Design and characterization of a multi-ring nested CMUT array for hydrophone[J]. Journal of Semiconductors, 2024, 45(11): 112301. doi: 10.1088/1674-4926/24060007
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L C Jia, R H Xue, and F S Meng, Design and characterization of a multi-ring nested CMUT array for hydrophone[J]. J. Semicond., 2024, 45(11), 112301 doi: 10.1088/1674-4926/24060007
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Design and characterization of a multi-ring nested CMUT array for hydrophone
DOI: 10.1088/1674-4926/24060007
More Information
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Licheng Jia received the Ph.D. degree in microelectronics and solid-state electronics in Wuhan University, Wuhan, China, in 2022. Presently, he is a lecturer at State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan, China. His research work is focusing on microfabrication, underwater MEMS and Bio-MEMS applications - Corresponding author: jialicheng@nuc.edu.cn
- Revised Date: 2024-07-16 Available Online: 2024-09-03
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Abstract
This paper presents the design, fabrication, packaging, and characterization of a high-performance CMUT array. The array, which features rectangular cells fabricated using a sacrificial release process, achieves a receiving sensitivity of −231.44 dB (re: 1 V/μPa) with a 40 dB gain. Notably, the CMUT array exhibits a minimal sensitivity variation of just 0.87 dB across a temperature range of 0 to 60 °C. Furthermore, the output voltage non-linearity at 1 kHz is approximately 0.44%. These test results demonstrate that the reception performance of the 67-element CMUT array is superior to that of commercial transducers. The high performance and compact design of this CMUT array underscore its significant commercial potential for hydrophone applications. -
References
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