Chin. J. Semicond. > 1989, Volume 10 > Issue 7 > 509-513
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PMMA的离子束曝光特性

王宇钢 , 赵渭江 , 郑桂洲 and 高玉芝

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    Received: 19 August 2015 Revised: Online: Published: 01 July 1989

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      Article Navigation >  Journal of Semiconductors  > 1989  >  10(7): 509-513
      王宇钢, 赵渭江, 郑桂洲, 高玉芝. PMMA的离子束曝光特性[J]. 半导体学报(英文版), 1989, 10(7): 509-513.
      Citation:
      王宇钢, 赵渭江, 郑桂洲, 高玉芝. PMMA的离子束曝光特性[J]. 半导体学报(英文版), 1989, 10(7): 509-513.
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      • Received Date: 2015-08-19

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