Chin. J. Semicond. > 2001, Volume 22 > Issue 1 > 61-65
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金属诱导法低温多晶硅薄膜的制备与研究

刘传珍 , 杨柏梁 , 袁剑峰 , 李牧菊 , 吴渊 , 寥燕平 , 张玉 , 王大海 and 黄锡珉

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Key words: 金属诱导晶化, 多晶硅

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    Received: 19 August 2015 Revised: Online: Published: 01 January 2001

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      Article Navigation >  Journal of Semiconductors  > 2001  >  22(1): 61-65
      刘传珍, 杨柏梁, 袁剑峰, 李牧菊, 吴渊, 寥燕平, 张玉, 王大海, 黄锡珉. 金属诱导法低温多晶硅薄膜的制备与研究[J]. 半导体学报(英文版), 2001, 22(1): 61-65.
      Citation:
      刘传珍, 杨柏梁, 袁剑峰, 李牧菊, 吴渊, 寥燕平, 张玉, 王大海, 黄锡珉. 金属诱导法低温多晶硅薄膜的制备与研究[J]. 半导体学报(英文版), 2001, 22(1): 61-65.
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      • Received Date: 2015-08-19

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