Chin. J. Semicond. > 1985, Volume 6 > Issue 3 > 326-328
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气相色谱测定非晶硅薄膜中氢含量

吕惠云 , 武锦华 , 尹恩华 , 刘昌灵 and 孔光临

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    Received: 20 August 2015 Revised: Online: Published: 01 March 1985

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      Article Navigation >  Journal of Semiconductors  > 1985  >  6(3): 326-328
      吕惠云, 武锦华, 尹恩华, 刘昌灵, 孔光临. 气相色谱测定非晶硅薄膜中氢含量[J]. 半导体学报(英文版), 1985, 6(3): 326-328.
      Citation:
      吕惠云, 武锦华, 尹恩华, 刘昌灵, 孔光临. 气相色谱测定非晶硅薄膜中氢含量[J]. 半导体学报(英文版), 1985, 6(3): 326-328.
      shu

      • Received Date: 2015-08-20

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