J. Semicond. > 2019, Volume 40 > Issue 6 > 061003
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REVIEWS

Synthesis, properties, and applications of large-scale two-dimensional materials by polymer-assisted deposition

Hongtao Ren1, 2, Yachao Liu1, Lei Zhang1, and Kai Liu2,

+ Author Affiliations

 Corresponding author: Lei Zhang, Emails: zhangleio@xjtu.edu.cn; Kai Liu, Emails: liuk@tsinghua.edu.cn

DOI: 10.1088/1674-4926/40/6/061003

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Abstract: Two-dimensional (2D) materials have attracted considerable attention because of their novel and tunable electronic, optical, ferromagnetic, and chemical properties. Compared to mechanical exfoliation and chemical vapor deposition, polymer-assisted deposition (PAD) is more suitable for mass production of 2D materials owing to its good reproducibility and reliability. In this review, we summarize the recent development of PAD on syntheses of 2D materials. First, we introduce principles and processing steps of PAD. Second, 2D materials, including graphene, MoS2, and MoS2/glassy-graphene heterostructures, are presented to illustrate the power of PAD and provide readers with the opportunity to assess the method. Last, we discuss the future prospects and challenges in this research field. This review provides a novel technique for preparing 2D layered materials and may inspire new applications of 2D layered materials.

Key words: polymer-assisted deposition, layered composite materials, glassy-graphene, MoS2, heterostructures



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Fig. 1.  (Color online) Timeline showing key development by polymer-assisted deposition. Metal oxides; metal nitrides; metal carbides; glassy-graphene; MoS2; MoS2/glassy-graphene heterostructure.

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Fig. 2.  (Color online) Application of as-grown thin films by PAD.

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Fig. 3.  (Color online) Schematic illustration of the main processing steps used to grow thin films by PAD.

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Fig. 4.  (Color online) Evolution from glassy carbon to glassy-graphene and graphene[37].

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Fig. 5.  (Color online) Preparation of glassy graphene-based circuits and the flexibility test[37].

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Fig. 6.  (Color online) Thickness-dependent bandgap tunable MoS2 thin films for optoelectronics[40].

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Fig. 7.  (Color online) Wafer-scale synthesis of MoS2 thin films via polymer-assisted deposition[39].

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Fig. 8.  (Color online) Formation of large-area web buckles[16].

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Fig. 9.  (Color online) Schematic of MGH preparation and 3D view of the transparent photodetector, photoresponsivity and time-resolved photoresponse of photodetectors under different illuminations[38].

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Table 1.   Elements in the magenta boxes coordinated with polymer to form a stable complex. The elements shown in red font were bound with the polymer in the previous reports.
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Table 2.   Summary of various metal elements binded by polymers.

ElementMetal precursorPolymerElementMetal precursorPolymer
Li[70]LiNO3PEI + EDTARu[49]RuCl3PAA
C[37]C6H12O6PEIAg[84]AgNO3PEI + C6H8O7
Al[68]Al(NO3)3PEI + HFIn[85]In(NO3)3PEI
Ca[45]Ca(OH)2PEISn[86]SnCl2PEIC
Sc[73]Sc(NO3)3PEI + EDTABa[65]Ba(NO3)2PEI + EDTA
Ti[1]Ti(cat)3(NH4)2PEIHf[42]HfCl4PEI
V [10]VOSO4PEI + EDTATa[33]TaCl5PEI + HF
Mn[45]MnCl2PEI + EDTAW[87](NH4)2WO4PEI
Fe[88]FeCl3PEIBi[10]Bi(NO3)3PEI + EDTA
Co[88]CoCl2PEILa[45]La(NO3)3PEI + EDTA
Ni[51]Ni(NO3)2PEI + EDTACe[72]Ce(NO3)3PEI + EDTA
Cu[68]Cu(NO3)2PEIPr[76]Pr(NO3)3PEI + EDTA
Zn[22]Zn(NO3)2PEINd[76]Nd(NO3)3PEI + EDTA
Ga[25]GaCl5PEISm[76]Sm(NO3)3PEI + EDTA
Ge[36]GeO2PEI + EDTAEu[42]EuCl3PEI
Sr[1]Sr(NO3)2PEI + EDTAGd[72]Gd(NO3)3PEI + EDTA
Y[10]Y(NO3)3PEI + EDTATm[42]TmCl3PEI
Zr[55]ZrO(NO3)2PEI + EDTAU[89]UO2(oAc)2PEI
Nb[26]NbCl5PEI + HFNp[46]239Np solutionPEI + EDTA
Mo[16](NH4)6Mo7O24PEI + EDTAPu[46]239Pu solutionPEI + EDTA
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Table 3.   Comparison of three different methods to synthesize MoS2 and MoS2 field-effect transistor structures.

MethodPrecursor gasTemperature (°C)CrystalizationConformalSizeMobility (cm2/(V·s))Response timeIon/Ioff ratio
CVDAr1000Single-crystalNo~cm29.6–105[92]
Ar850Single-crystalNo–50–106[92]
ALDH2S; Ar60AmorphousYes–0.23–102[93]
PADAr + H2850PolycrystallineYes~cm2–0.3 ms3[40]
Ar + H2700PolycrystallineYes6-inch–1.0 ms104[39]
Ar + H2550AmorphousYes~cm2–––[16]
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      Article Navigation >  Journal of Semiconductors  > 2019  >  40(6): 061003
      Hongtao Ren, Yachao Liu, Lei Zhang, Kai Liu. Synthesis, properties, and applications of large-scale two-dimensional materials by polymer-assisted deposition[J]. Journal of Semiconductors, 2019, 40(6): 061003. doi: 10.1088/1674-4926/40/6/061003 ****H T Ren, Y C Liu, L Zhang, K Liu, Synthesis, properties, and applications of large-scale two-dimensional materials by polymer-assisted deposition[J]. J. Semicond., 2019, 40(6): 061003. doi: 10.1088/1674-4926/40/6/061003.
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      Hongtao Ren, Yachao Liu, Lei Zhang, Kai Liu. Synthesis, properties, and applications of large-scale two-dimensional materials by polymer-assisted deposition[J]. Journal of Semiconductors, 2019, 40(6): 061003. doi: 10.1088/1674-4926/40/6/061003 ****
      H T Ren, Y C Liu, L Zhang, K Liu, Synthesis, properties, and applications of large-scale two-dimensional materials by polymer-assisted deposition[J]. J. Semicond., 2019, 40(6): 061003. doi: 10.1088/1674-4926/40/6/061003.
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      Synthesis, properties, and applications of large-scale two-dimensional materials by polymer-assisted deposition

      DOI: 10.1088/1674-4926/40/6/061003
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        MOE Key Laboratory for Nonequilibrium Synthesis and Modulation of Condensed Matter, School of Science, Xi’an Jiaotong University, Xi’an 710049, China

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        State Key Laboratory of New Ceramics and Fine Processing, School of Materials Science and Engineering, Tsinghua University, Beijing 100084, China

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