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ULSI硅衬底的化学机械抛光 358
2004, 25(1): 115-119.
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A wide-bandgap copolymer donor with a 5-methyl-4H-dithieno[3,2-e:2',3'-g]isoindole-4,6(5H)-dione unit 266
Anxin Sun, Jingui Xu, Guanhua Zong, Zuo Xiao, Yong Hua, Bin Zhang, Liming Ding
2021, 42(10): 100502. doi: 10.1088/1674-4926/42/10/100502

Dithieno[3',2':3,4;2'',3'':5,6]benzo[1,2-c][1,2,5]oxadiazole-based polymer donors with deep HOMO levels 189
Xiongfeng Li, Jingui Xu, Zuo Xiao, Xingzhu Wang, Bin Zhang, Liming Ding
2021, 42(6): 060501. doi: 10.1088/1674-4926/42/6/060501

Characteristics of gallium oxide nMOSFET inverter 128
Yixin Zhang, Haifeng Chen, Zijie Ding, Yuduo Zhang, Qin Lu, Xiangtai Liu, Yunhe Guan
doi: 10.1088/1674-4926/25040011

β-Ga2O3 MOS inverter should play a crucial role in β-Ga2O3 electronic circuits. Enhancement-mode (E-mode) MOSFET was fabricated based on β-Ga2O3 film grown by atomic layer deposition technology, and the β-Ga2O3 inverter was further monolithically integrated on this basis. The β-Ga2O3 nMOSFET exhibits excellent electrical characteristics with an on/off current ratio reaching 105. The logic inverter shows outstanding voltage inversion characteristics under low-frequency from 1 to 400 Hz operation. As the frequency continues to increase to 10 K, the reverse characteristic becomes worse due to parasitic capacitance induced by processes, and the difference between the highest and lowest values of VOUT has an exponential decay relationship with the frequency. This paper provides the practice for the development of β-Ga2O3-based circuits.

Model of NBTI combined with mobility degradation 106
Xuezhong Wu, Chenyue Ma, Shucheng Gao, Xiangbin Li, Fu Sun, Lining Zhang, Xinnan Lin
2018, 39(12): 124015. doi: 10.1088/1674-4926/39/12/124015

The mobility degradation induced by negative bias temperature instability (NBTI) is usually ignored in traditional NBTI modeling and simulation, resulting in overestimation of the circuit lifetime, especially after long-term operation. In this paper, the mobility degradation is modeled in combination with the universal NBTI model. The coulomb scattering induced by interface states is revealed to be the dominant component responsible for mobility degradation. The proposed mobility degradation model fits the measured data well and provides an accurate solution for evaluating coupling of NBTI with HCI (hot carrier injection) and SHE (self-heating effect), which indicates that mobility degradation should be considered in long-term circuit aging simulation.

A review on SRAM-based computing in-memory: Circuits, functions, and applications 92
Zhiting Lin, Zhongzhen Tong, Jin Zhang, Fangming Wang, Tian Xu, Yue Zhao, Xiulong Wu, Chunyu Peng, Wenjuan Lu, Qiang Zhao, Junning Chen
2022, 43(3): 031401. doi: 10.1088/1674-4926/43/3/031401

Artificial intelligence (AI) processes data-centric applications with minimal effort. However, it poses new challenges to system design in terms of computational speed and energy efficiency. The traditional von Neumann architecture cannot meet the requirements of heavily data-centric applications due to the separation of computation and storage. The emergence of computing in-memory (CIM) is significant in circumventing the von Neumann bottleneck. A commercialized memory architecture, static random-access memory (SRAM), is fast and robust, consumes less power, and is compatible with state-of-the-art technology. This study investigates the research progress of SRAM-based CIM technology in three levels: circuit, function, and application. It also outlines the problems, challenges, and prospects of SRAM-based CIM macros.

Advancing highly efficient and mechanically resilient flexible perovskite-silicon tandem solar cells 89
Zhaoyang Han, Qi Jiang
doi: 10.1088/1674-4926/25110013

Multiply accumulate operations in memristor crossbar arrays for analog computing 79
Jia Chen, Jiancong Li, Yi Li, Xiangshui Miao
2021, 42(1): 013104. doi: 10.1088/1674-4926/42/1/013104

Memristors are now becoming a prominent candidate to serve as the building blocks of non-von Neumann in-memory computing architectures. By mapping analog numerical matrices into memristor crossbar arrays, efficient multiply accumulate operations can be performed in a massively parallel fashion using the physics mechanisms of Ohm’s law and Kirchhoff’s law. In this brief review, we present the recent progress in two niche applications: neural network accelerators and numerical computing units, mainly focusing on the advances in hardware demonstrations. The former one is regarded as soft computing since it can tolerant some degree of the device and array imperfections. The acceleration of multiple layer perceptrons, convolutional neural networks, generative adversarial networks, and long short-term memory neural networks are described. The latter one is hard computing because the solving of numerical problems requires high-precision devices. Several breakthroughs in memristive equation solvers with improved computation accuracies are highlighted. Besides, other nonvolatile devices with the capability of analog computing are also briefly introduced. Finally, we conclude the review with discussions on the challenges and opportunities for future research toward realizing memristive analog computing machines.

A review of silicon-based wafer bonding processes, an approach to realize the monolithic integration of Si-CMOS and III–V-on-Si wafers 78
Shuyu Bao, Yue Wang, Khaw Lina, Li Zhang, Bing Wang, Wardhana Aji Sasangka, Kenneth Eng Kian Lee, Soo Jin Chua, Jurgen Michel, Eugene Fitzgerald, Chuan Seng Tan, Kwang Hong Lee
2021, 42(2): 023106. doi: 10.1088/1674-4926/42/2/023106

The heterogeneous integration of III–V devices with Si-CMOS on a common Si platform has shown great promise in the new generations of electrical and optical systems for novel applications, such as HEMT or LED with integrated control circuitry. For heterogeneous integration, direct wafer bonding (DWB) techniques can overcome the materials and thermal mismatch issues by directly bonding dissimilar materials systems and device structures together. In addition, DWB can perform at wafer-level, which eases the requirements for integration alignment and increases the scalability for volume production. In this paper, a brief review of the different bonding technologies is discussed. After that, three main DWB techniques of single-, double- and multi-bonding are presented with the demonstrations of various heterogeneous integration applications. Meanwhile, the integration challenges, such as micro-defects, surface roughness and bonding yield are discussed in detail.

Indium–gallium–zinc–oxide thin-film transistors: Materials, devices, and applications 76
Ying Zhu, Yongli He, Shanshan Jiang, Li Zhu, Chunsheng Chen, Qing Wan
2021, 42(3): 031101. doi: 10.1088/1674-4926/42/3/031101

Since the invention of amorphous indium–gallium–zinc–oxide (IGZO) based thin-film transistors (TFTs) by Hideo Hosono in 2004, investigations on the topic of IGZO TFTs have been rapidly expanded thanks to their high electrical performance, large-area uniformity, and low processing temperature. This article reviews the recent progress and major trends in the field of IGZO-based TFTs. After a brief introduction of the history of IGZO and the main advantages of IGZO-based TFTs, an overview of IGZO materials and IGZO-based TFTs is given. In this part, IGZO material electron travelling orbitals and deposition methods are introduced, and the specific device structures and electrical performance are also presented. Afterwards, the recent advances of IGZO-based TFT applications are summarized, including flat panel display drivers, novel sensors, and emerging neuromorphic systems. In particular, the realization of flexible electronic systems is discussed. The last part of this review consists of the conclusions and gives an outlook over the field with a prediction for the future.