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A wide-bandgap copolymer donor with a 5-methyl-4H-dithieno[3,2-e:2',3'-g]isoindole-4,6(5H)-dione unit 463
Anxin Sun, Jingui Xu, Guanhua Zong, Zuo Xiao, Yong Hua, Bin Zhang, Liming Ding
2021, 42(10): 100502. doi: 10.1088/1674-4926/42/10/100502

ULSI硅衬底的化学机械抛光 252
2004, 25(1): 115-119.
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Model of NBTI combined with mobility degradation 194
Xuezhong Wu, Chenyue Ma, Shucheng Gao, Xiangbin Li, Fu Sun, Lining Zhang, Xinnan Lin
2018, 39(12): 124015. doi: 10.1088/1674-4926/39/12/124015

The mobility degradation induced by negative bias temperature instability (NBTI) is usually ignored in traditional NBTI modeling and simulation, resulting in overestimation of the circuit lifetime, especially after long-term operation. In this paper, the mobility degradation is modeled in combination with the universal NBTI model. The coulomb scattering induced by interface states is revealed to be the dominant component responsible for mobility degradation. The proposed mobility degradation model fits the measured data well and provides an accurate solution for evaluating coupling of NBTI with HCI (hot carrier injection) and SHE (self-heating effect), which indicates that mobility degradation should be considered in long-term circuit aging simulation.

Characteristics of gallium oxide nMOSFET inverter 191
Yixin Zhang, Haifeng Chen, Zijie Ding, Yuduo Zhang, Qin Lu, Xiangtai Liu, Yunhe Guan
doi: 10.1088/1674-4926/25040011

β-Ga2O3 MOS inverter should play a crucial role in β-Ga2O3 electronic circuits. Enhancement-mode (E-mode) MOSFET was fabricated based on β-Ga2O3 film grown by atomic layer deposition technology, and the β-Ga2O3 inverter was further monolithically integrated on this basis. The β-Ga2O3 nMOSFET exhibits excellent electrical characteristics with an on/off current ratio reaching 105. The logic inverter shows outstanding voltage inversion characteristics under low-frequency from 1 to 400 Hz operation. As the frequency continues to increase to 10 K, the reverse characteristic becomes worse due to parasitic capacitance induced by processes, and the difference between the highest and lowest values of VOUT has an exponential decay relationship with the frequency. This paper provides the practice for the development of β-Ga2O3-based circuits.

Dithieno[3',2':3,4;2'',3'':5,6]benzo[1,2-c][1,2,5]oxadiazole-based polymer donors with deep HOMO levels 140
Xiongfeng Li, Jingui Xu, Zuo Xiao, Xingzhu Wang, Bin Zhang, Liming Ding
2021, 42(6): 060501. doi: 10.1088/1674-4926/42/6/060501

Multiple SiGe/Si layers epitaxy and SiGe selective etching for vertically stacked DRAM 137
Zhenzhen Kong, Hongxiao Lin, Hailing Wang, Yanpeng Song, Junjie Li, Xiaomeng Liu, Anyan Du, Yuanhao Miao, Yiwen Zhang, Yuhui Ren, Chen Li, Jiahan Yu, Jinbiao Liu, Jingxiong Liu, Qinzhu Zhang, Jianfeng Gao, Huihui Li, Xiangsheng Wang, Junfeng Li, Henry H. Radamson, Chao Zhao, Tianchun Ye, Guilei Wang
2023, 44(12): 124101. doi: 10.1088/1674-4926/44/12/124101

Fifteen periods of Si/Si0.7Ge0.3 multilayers (MLs) with various SiGe thicknesses are grown on a 200 mm Si substrate using reduced pressure chemical vapor deposition (RPCVD). Several methods were utilized to characterize and analyze the ML structures. The high resolution transmission electron microscopy (HRTEM) results show that the ML structure with 20 nm Si0.7Ge0.3 features the best crystal quality and no defects are observed. Stacked Si0.7Ge0.3 ML structures etched by three different methods were carried out and compared, and the results show that they have different selectivities and morphologies. In this work, the fabrication process influences on Si/SiGe MLs are studied and there are no significant effects on the Si layers, which are the channels in lateral gate all around field effect transistor (L-GAAFET) devices. For vertically-stacked dynamic random access memory (VS-DRAM), it is necessary to consider the dislocation caused by strain accumulation and stress release after the number of stacked layers exceeds the critical thickness. These results pave the way for the manufacture of high-performance multivertical-stacked Si nanowires, nanosheet L-GAAFETs, and DRAM devices.

Indium–gallium–zinc–oxide thin-film transistors: Materials, devices, and applications 129
Ying Zhu, Yongli He, Shanshan Jiang, Li Zhu, Chunsheng Chen, Qing Wan
2021, 42(3): 031101. doi: 10.1088/1674-4926/42/3/031101

Since the invention of amorphous indium–gallium–zinc–oxide (IGZO) based thin-film transistors (TFTs) by Hideo Hosono in 2004, investigations on the topic of IGZO TFTs have been rapidly expanded thanks to their high electrical performance, large-area uniformity, and low processing temperature. This article reviews the recent progress and major trends in the field of IGZO-based TFTs. After a brief introduction of the history of IGZO and the main advantages of IGZO-based TFTs, an overview of IGZO materials and IGZO-based TFTs is given. In this part, IGZO material electron travelling orbitals and deposition methods are introduced, and the specific device structures and electrical performance are also presented. Afterwards, the recent advances of IGZO-based TFT applications are summarized, including flat panel display drivers, novel sensors, and emerging neuromorphic systems. In particular, the realization of flexible electronic systems is discussed. The last part of this review consists of the conclusions and gives an outlook over the field with a prediction for the future.

Robotic computing system and embodied AI evolution: an algorithm-hardware co-design perspective 115
Longke Yan, Xin Zhao, Bohan Yang, Yongkun Wu, Guangnan Dai, Jiancong Li, Chi-Ying Tsui, Kwang-Ting Cheng, Yihan Zhang, Fengbin Tu
2025, 46(10): 101201. doi: 10.1088/1674-4926/25020034

Robotic computing systems play an important role in enabling intelligent robotic tasks through intelligent algorithms and supporting hardware. In recent years, the evolution of robotic algorithms indicates a roadmap from traditional robotics to hierarchical and end-to-end models. This algorithmic advancement poses a critical challenge in achieving balanced system-wide performance. Therefore, algorithm-hardware co-design has emerged as the primary methodology, which analyzes algorithm behaviors on hardware to identify common computational properties. These properties can motivate algorithm optimization to reduce computational complexity and hardware innovation from architecture to circuit for high performance and high energy efficiency. We then reviewed recent works on robotic and embodied AI algorithms and computing hardware to demonstrate this algorithm-hardware co-design methodology. In the end, we discuss future research opportunities by answering two questions: (1) how to adapt the computing platforms to the rapid evolution of embodied AI algorithms, and (2) how to transform the potential of emerging hardware innovations into end-to-end inference improvements.

Recent development of flexible perovskite solar cells and its potential applications to aerospace 101
Shaoqi Bian, Guangshu Xu, Shufang Zhang, Qi Jiang, Xiaoguang Ma, Jingbi You, Xinbo Chu
2025, 46(5): 051801. doi: 10.1088/1674-4926/24090031

Due to advantages of high power-conversion efficiency (PCE), large power-to-weight ratio (PWR), low cost and solution processibility, flexible perovskite solar cells (f-PSCs) have attracted extensive attention in recent years. The PCE of f-PSCs has developed rapidly to over 25%, showing great application prospects in aerospace and wearable electronic devices. This review systematically sorts device structures and compositions of f-PSCs, summarizes various methods to improve its efficiency and stability recent years. In addition, the applications and potentials of f-PSCs in space vehicle and aircraft was discussed. At last, we prospect the key scientific and technological issues that need to be addressed for f-PSCs at current stage.

A review on SRAM-based computing in-memory: Circuits, functions, and applications 99
Zhiting Lin, Zhongzhen Tong, Jin Zhang, Fangming Wang, Tian Xu, Yue Zhao, Xiulong Wu, Chunyu Peng, Wenjuan Lu, Qiang Zhao, Junning Chen
2022, 43(3): 031401. doi: 10.1088/1674-4926/43/3/031401

Artificial intelligence (AI) processes data-centric applications with minimal effort. However, it poses new challenges to system design in terms of computational speed and energy efficiency. The traditional von Neumann architecture cannot meet the requirements of heavily data-centric applications due to the separation of computation and storage. The emergence of computing in-memory (CIM) is significant in circumventing the von Neumann bottleneck. A commercialized memory architecture, static random-access memory (SRAM), is fast and robust, consumes less power, and is compatible with state-of-the-art technology. This study investigates the research progress of SRAM-based CIM technology in three levels: circuit, function, and application. It also outlines the problems, challenges, and prospects of SRAM-based CIM macros.